Vacuum Process Gas High-Speed Annealing Equipment "RTP/VPO Series"
Maximum reaching temperature of 1,000℃! This is a high-speed annealing heating device that can be integrated into inline systems as well as for prototype development purposes.
The "RTP/VPO series" is a tabletop type high-speed annealing device for vacuum and process gases. It includes models such as "RTP-150," which is suitable for research and development requiring high purity and stability, such as the thermal oxidation process of SiC and crystal growth of GaN, as well as "RTP-100" and "VPO-1000-300." 【RTP-150 Features】 ■ Compatible with 6-inch wafers ■ Maximum achievable temperature of 1000℃ ■ Achieves linear temperature control ■ Significantly reduces the occurrence of contamination ■ Options available to accommodate various experimental environments *For more details, please refer to the PDF document or feel free to contact us.
- Company：ユニテンプジャパン
- Price：Other
